Effect of temperature on the growth of ZnO/Al2O3 nanolaminate thin films on the glass and silicon substrate. › SPbU Researchers Portal

Effect of temperature on the growth of ZnO/Al2O3 nanolaminate thin films on the glass and silicon substrate.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research

A.A. Ashmarin
V.E. Drozd
A.V. Drozd
V.A. Kozakov
D. Nazarov
I.O. Nikiforova
A.I. Romanychev
R.N. Rizakhanov
S.K. Sigalaev

Original language	Undefined
Title of host publication	Baltic ALD-2014
Pages	132
State	Published - 2014
Externally published	Yes

ID: 4706777