Research output: Contribution to journal › Meeting Abstract › peer-review
543 KB, PDF document
| Original language | English |
|---|---|
| Journal | Microelectronic Engineering |
| Issue number | Special Issue |
| State | Published - 2017 |
| Event | 20th Conference on Insulating Films on Semiconductors - Potsdam, Germany Duration: 27 Jun 2017 → 30 Jun 2017 |
ID: 94122924