Standard

Dynamics and control of thin film growth process from a multicomponent gas. / Fradkov, A. L.; Guzenko, P. Yu; Kukushkin, S. A.; Osipov, A. V.

In: Journal of Physics D: Applied Physics, Vol. 30, No. 20, 21.10.1997, p. 2794-2797.

Research output: Contribution to journal › Article › peer-review

Harvard

Fradkov, AL, Guzenko, PY, Kukushkin, SA & Osipov, AV 1997, 'Dynamics and control of thin film growth process from a multicomponent gas', Journal of Physics D: Applied Physics, vol. 30, no. 20, pp. 2794-2797. https://doi.org/10.1088/0022-3727/30/20/004

APA

Fradkov, A. L., Guzenko, P. Y., Kukushkin, S. A., & Osipov, A. V. (1997). Dynamics and control of thin film growth process from a multicomponent gas. Journal of Physics D: Applied Physics, 30(20), 2794-2797. https://doi.org/10.1088/0022-3727/30/20/004

Vancouver

Fradkov AL, Guzenko PY, Kukushkin SA, Osipov AV. Dynamics and control of thin film growth process from a multicomponent gas. Journal of Physics D: Applied Physics. 1997 Oct 21;30(20):2794-2797. https://doi.org/10.1088/0022-3727/30/20/004

Author

Fradkov, A. L. ; Guzenko, P. Yu ; Kukushkin, S. A. ; Osipov, A. V. / Dynamics and control of thin film growth process from a multicomponent gas. In: Journal of Physics D: Applied Physics. 1997 ; Vol. 30, No. 20. pp. 2794-2797.

BibTeX

@article{0f6d102718934125b8d0aa700e7ed5cd,
title = "Dynamics and control of thin film growth process from a multicomponent gas",
abstract = "The control of a model system describing thin film growth processes from a multicomponent gas with chemical reactions occurring between components of source phase is studied. It is shown that condensation of thin films may be realized by different ways. In particular, for a low rate of particles arriving on a substrate the stable condensation mode occurs and any deviations from equilibrium are dumped. For a medium arrival rate, phase transitions take place in the oscillation mode (stable limit cycle). For a large arrival rate the stable limit cycle is destroyed and new phase condensation takes place in saw-tooth (accumulative) mode. A method of adaptive control of this oscillatory process - by varying the external parameters - is described based on recursive goal inequalities and an input-output linearized Poincar{\'e} map. The controlled system behaviour is analysed by means of computer simulations. It is found that the system being investigated has a peculiar memory because film condensation occurs in a different way for the same parameters but with differences in prehistory. It is noted that even small differences in the prehistory of the external parameters can lead to different modes of settling.",
author = "Fradkov, {A. L.} and Guzenko, {P. Yu} and Kukushkin, {S. A.} and Osipov, {A. V.}",
year = "1997",
month = oct,
day = "21",
doi = "10.1088/0022-3727/30/20/004",
language = "English",
volume = "30",
pages = "2794--2797",
journal = "Journal Physics D: Applied Physics",
issn = "0022-3727",
publisher = "IOP Publishing Ltd.",
number = "20",

}

RIS

TY - JOUR

T1 - Dynamics and control of thin film growth process from a multicomponent gas

AU - Fradkov, A. L.

AU - Guzenko, P. Yu

AU - Kukushkin, S. A.

AU - Osipov, A. V.

PY - 1997/10/21

Y1 - 1997/10/21

N2 - The control of a model system describing thin film growth processes from a multicomponent gas with chemical reactions occurring between components of source phase is studied. It is shown that condensation of thin films may be realized by different ways. In particular, for a low rate of particles arriving on a substrate the stable condensation mode occurs and any deviations from equilibrium are dumped. For a medium arrival rate, phase transitions take place in the oscillation mode (stable limit cycle). For a large arrival rate the stable limit cycle is destroyed and new phase condensation takes place in saw-tooth (accumulative) mode. A method of adaptive control of this oscillatory process - by varying the external parameters - is described based on recursive goal inequalities and an input-output linearized Poincaré map. The controlled system behaviour is analysed by means of computer simulations. It is found that the system being investigated has a peculiar memory because film condensation occurs in a different way for the same parameters but with differences in prehistory. It is noted that even small differences in the prehistory of the external parameters can lead to different modes of settling.

AB - The control of a model system describing thin film growth processes from a multicomponent gas with chemical reactions occurring between components of source phase is studied. It is shown that condensation of thin films may be realized by different ways. In particular, for a low rate of particles arriving on a substrate the stable condensation mode occurs and any deviations from equilibrium are dumped. For a medium arrival rate, phase transitions take place in the oscillation mode (stable limit cycle). For a large arrival rate the stable limit cycle is destroyed and new phase condensation takes place in saw-tooth (accumulative) mode. A method of adaptive control of this oscillatory process - by varying the external parameters - is described based on recursive goal inequalities and an input-output linearized Poincaré map. The controlled system behaviour is analysed by means of computer simulations. It is found that the system being investigated has a peculiar memory because film condensation occurs in a different way for the same parameters but with differences in prehistory. It is noted that even small differences in the prehistory of the external parameters can lead to different modes of settling.

UR - http://www.scopus.com/inward/record.url?scp=0031250028&partnerID=8YFLogxK

U2 - 10.1088/0022-3727/30/20/004

DO - 10.1088/0022-3727/30/20/004

M3 - Article

AN - SCOPUS:0031250028

VL - 30

SP - 2794

EP - 2797

JO - Journal Physics D: Applied Physics

JF - Journal Physics D: Applied Physics

SN - 0022-3727

IS - 20

ER -

ID: 97265737