DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA

In: ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ, Vol. 62, No. 2, 02.1992, p. 41-46.

Research output: Contribution to journal › Article › peer-review

DUNAEV, VV, ZHIGLINSKII, AG, SUKHOMLINOV, VS & FAFURINA, EN 1992, 'DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA', ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ, vol. 62, no. 2, pp. 41-46.

DUNAEV, VV., ZHIGLINSKII, AG., SUKHOMLINOV, VS., & FAFURINA, EN. (1992). DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA. ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ, 62(2), 41-46.

DUNAEV VV, ZHIGLINSKII AG, SUKHOMLINOV VS, FAFURINA EN. DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA. ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ. 1992 Feb;62(2):41-46.

DUNAEV, VV ; ZHIGLINSKII, AG ; SUKHOMLINOV, VS ; FAFURINA, EN. / DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA. In: ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ. 1992 ; Vol. 62, No. 2. pp. 41-46.

@article{d4850e5b2ec04f998cef1914323513a0,

title = "DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA",

keywords = "DISCHARGE",

author = "VV DUNAEV and AG ZHIGLINSKII and VS SUKHOMLINOV and EN FAFURINA",

year = "1992",

month = feb,

language = "русский",

volume = "62",

pages = "41--46",

journal = "ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ",

issn = "0044-4642",

publisher = "ФТИ им.Иоффе",

number = "2",

}

TY - JOUR

T1 - DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA

AU - DUNAEV, VV

AU - ZHIGLINSKII, AG

AU - SUKHOMLINOV, VS

AU - FAFURINA, EN

PY - 1992/2

Y1 - 1992/2

KW - DISCHARGE

M3 - статья

VL - 62

SP - 41

EP - 46

JO - ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ

JF - ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ

SN - 0044-4642

IS - 2

ER -

ID: 9656837