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DETERMINATION OF ULTIMATE SELECTIVE COEFFICIENTS OF HOLLOW-CATHODE SPUTTERING IN HYDROGEN PLASMA

Research output: Contribution to journal › Article › peer-review

Department of Optics

VV DUNAEV
AG ZHIGLINSKII
VS SUKHOMLINOV
EN FAFURINA

Original language	Russian
Pages (from-to)	41-46
Number of pages	6
Journal	ЖУРНАЛ ТЕХНИЧЕСКОЙ ФИЗИКИ
Volume	62
Issue number	2
State	Published - Feb 1992

Research areas

DISCHARGE

ID: 9656837