Research output: Contribution to conference › Abstract › peer-review
| Original language | English |
|---|---|
| Pages | 84 |
| Number of pages | 1 |
| State | Published - Sep 2021 |
| Event | 3rd International Workshop "Atomic Layer Deposition Russia 2021" - Санкт-Петербургский государственный технологический институт (технический университет), Saint Petersburg, Russian Federation Duration: 27 Sep 2021 → 30 Sep 2021 http://technolog.edu.ru/aldrussia/ |
| Conference | 3rd International Workshop "Atomic Layer Deposition Russia 2021" |
|---|---|
| Abbreviated title | ALD Russia 2021 |
| Country/Territory | Russian Federation |
| City | Saint Petersburg |
| Period | 27/09/21 → 30/09/21 |
| Internet address |
ID: 85939800