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Absolute total and partial electron ionization cross sections of C2F6. / Basner, R.; Schmidt, M.; Denisov, E.; Lopata, P.; Becker, K.; Deutsch, H.

In: International Journal of Mass Spectrometry, Vol. 214, No. 3, PII S1387-3806(02)00541-9, 15.03.2002, p. 365-374.

Research output: Contribution to journal › Article › peer-review

Harvard

Basner, R, Schmidt, M, Denisov, E, Lopata, P, Becker, K & Deutsch, H 2002, 'Absolute total and partial electron ionization cross sections of C2F6', International Journal of Mass Spectrometry, vol. 214, no. 3, PII S1387-3806(02)00541-9, pp. 365-374. https://doi.org/10.1016/S1387-3806(02)00541-9

APA

Basner, R., Schmidt, M., Denisov, E., Lopata, P., Becker, K., & Deutsch, H. (2002). Absolute total and partial electron ionization cross sections of C2F6. International Journal of Mass Spectrometry, 214(3), 365-374. [PII S1387-3806(02)00541-9]. https://doi.org/10.1016/S1387-3806(02)00541-9

Vancouver

Basner R, Schmidt M, Denisov E, Lopata P, Becker K, Deutsch H. Absolute total and partial electron ionization cross sections of C2F6. International Journal of Mass Spectrometry. 2002 Mar 15;214(3):365-374. PII S1387-3806(02)00541-9. https://doi.org/10.1016/S1387-3806(02)00541-9

Author

Basner, R. ; Schmidt, M. ; Denisov, E. ; Lopata, P. ; Becker, K. ; Deutsch, H. / Absolute total and partial electron ionization cross sections of C2F6. In: International Journal of Mass Spectrometry. 2002 ; Vol. 214, No. 3. pp. 365-374.

BibTeX

@article{f4787c9757bb4db4acdcbb388175f44f,
title = "Absolute total and partial electron ionization cross sections of C2F6",
abstract = "We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections.",
keywords = "Cross sections, Electron ionization, Hexafluoroethane, Plasma etching, Tetrafluoromethane",
author = "R. Basner and M. Schmidt and E. Denisov and P. Lopata and K. Becker and H. Deutsch",
note = "Funding Information: The authors thank the DAAD for supporting the stay of ED at the INP. Two of us (P.L., K.B.) would like to acknowledge partial financial support by the Division of Chemical Science, Office of Basic Energy Sciences, Office of Energy Research, US Department of Energy. We are grateful for the technical assistance provided by Ms. U. Haeder.",
year = "2002",
month = mar,
day = "15",
doi = "10.1016/S1387-3806(02)00541-9",
language = "English",
volume = "214",
pages = "365--374",
journal = "International Journal of Mass Spectrometry",
issn = "1387-3806",
publisher = "Elsevier",
number = "3",

}

RIS

TY - JOUR

T1 - Absolute total and partial electron ionization cross sections of C2F6

AU - Basner, R.

AU - Schmidt, M.

AU - Denisov, E.

AU - Lopata, P.

AU - Becker, K.

AU - Deutsch, H.

N1 - Funding Information: The authors thank the DAAD for supporting the stay of ED at the INP. Two of us (P.L., K.B.) would like to acknowledge partial financial support by the Division of Chemical Science, Office of Basic Energy Sciences, Office of Energy Research, US Department of Energy. We are grateful for the technical assistance provided by Ms. U. Haeder.

PY - 2002/3/15

Y1 - 2002/3/15

N2 - We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections.

AB - We measured absolute partial and total cross sections for the electron ionization of hexafluoroethane (C2F6) from threshold to 900eV using a time-of-flight mass spectrometer (TOF-MS), which can be operated in a linear and in a reflection mode. Measurements were also made for tetrafluoromethane (CF4), which is perhaps the most thoroughly investigated complex polyatomic molecule in terms of ionization cross sections, in an effort to demonstrate the reliable performance of our apparatus. Our measurements for both CF4 and C2F6 are compared with other available experimental data and with calculated cross sections.

KW - Cross sections

KW - Electron ionization

KW - Hexafluoroethane

KW - Plasma etching

KW - Tetrafluoromethane

UR - http://www.scopus.com/inward/record.url?scp=0037086583&partnerID=8YFLogxK

U2 - 10.1016/S1387-3806(02)00541-9

DO - 10.1016/S1387-3806(02)00541-9

M3 - Article

VL - 214

SP - 365

EP - 374

JO - International Journal of Mass Spectrometry

JF - International Journal of Mass Spectrometry

SN - 1387-3806

IS - 3

M1 - PII S1387-3806(02)00541-9

ER -

ID: 87707679