Funtikova, A. S.,
Sharov, V. A.,
Dvoretckaia, L. N.,
Novikova, K. N.,
Eurov, D. A.,
Stovpiaga, E. Y.,
Kurdyukov, D. A.,
Aybush, A. V.,
Koroleva, A. V.,
Zhizhin, E. V.,
Fedorov, V. V.,
Miniv, D. V.,
Mozharov, A. M. &
Mukhin, I. S.,
15 Mar 2026,
In: Materials Science in Semiconductor Processing. 204,
1 p., 110328.
Research output: Contribution to journal › Article › peer-review
