Uymina, P. G., Anikina, M. A., Speshilova, A. B., Kondratev, V. M., Karaseva, E. P., Shmakov, S. V., Kuznetsov, A., Syuy, A. V., Osipov, A. A., Mishin, M. V. & Bolshakov, A. D., 1 Dec 2025, In: Materials Science in Semiconductor Processing.200
Research output: Contribution to journal › Article › peer-review