The microstructure, chemical and phase composition, and corrosion resistance of coatings deposited by thermolysis of vapors of volatile technetium carbonyl compounds on a titanium support are studied. The relationship between the nature of the starting compound, conditions of the heat treatment of the coatings, and their chemical and phase composition and corrosion resistance is analyzed. Vacuum annealing at a high temperature (no less than 900°C) is the necessary condition for preparing corrosion-resistant coatings. The highest corrosion resistance is attained at low (<2%) and high (>15%) carbon content of the coating. Some samples are not inferior to dense technetium foil in the corrosion resistance. Ways of further improvement of the deposition process are outlined.