TY - JOUR

T1 - Usage of nanoceramic based on ZrO2in fabrication of sources for magnetron sputtering

AU - Konakov, V.G.

AU - Ovid'ko, I.A.

AU - Kurapova, O.Y.

AU - Novik, N.N.

AU - Archakov, I.Y.

PY - 2014

Y1 - 2014

N2 - © 2014, Institute of Problems of Mechanical Engineering. The paper reports the development of the approach providing the opportunity to fabricate nanoceramic sources based on yttrium stabilized zirconia (YSZ) for magnetron sputtering. The approach includes sol-gel reverse precipitation synthesis of nanosize YSZ precursor powders with further freeze-drying resulting in high precursor powder dispersity and low agglomeration level in a wide temperature range. The use of such precursor powders makes possible fabrication of YSZ ceramics free of inorganic binders; this ceramics meets the requirements for the magnetron sputtering source material.

AB - © 2014, Institute of Problems of Mechanical Engineering. The paper reports the development of the approach providing the opportunity to fabricate nanoceramic sources based on yttrium stabilized zirconia (YSZ) for magnetron sputtering. The approach includes sol-gel reverse precipitation synthesis of nanosize YSZ precursor powders with further freeze-drying resulting in high precursor powder dispersity and low agglomeration level in a wide temperature range. The use of such precursor powders makes possible fabrication of YSZ ceramics free of inorganic binders; this ceramics meets the requirements for the magnetron sputtering source material.

M3 - статья

SP - 305

EP - 310

JO - ФИЗИКА И МЕХАНИКА МАТЕРИАЛОВ

JF - ФИЗИКА И МЕХАНИКА МАТЕРИАЛОВ

SN - 1605-2730

IS - 3

ER -