TY - JOUR

T1 - Uniform lanthanum oxide atomic layer deposition using ozone

AU - Ольховский, Денис

AU - Ежов, Илья

AU - Вишняков, Павел

AU - Назаров, Денис Васильевич

AU - Максимов, Максим

PY - 2025/12/24

Y1 - 2025/12/24

N2 - This study investigated the problem of lanthanum oxide uniform growth by atomic layer deposition (ALD) using water as the oxygen reagent.Although water is the classic reagent for ALD, it can be the reason for some problems (e.g., nonuniformity) with hygroscopic oxides (such aslanthanum oxide). There are some ways to improve coating quality: increase the purge duration after the water pulse, increase the synthesistemperature with the water process, and replace the oxygen reagent (e.g., for ozone). In this work, ways to improve were studied in theprocesses of coating growth using La(iPrCp)3. Spectral ellipsometry was used to study the thickness of the coatings. X-ray photoelectronspectroscopy with argon ion etching was used to investigate the chemical composition. X-ray diffraction and x-ray reflectometry were used todefine structural properties. The influence of the purge duration after water and the reactor temperature was defined. The ALD parameters ofLa(iPrCp)3 and ozone were investigated. The dependence of coating characterization on oxygen reagent was researched. No improvements inuniformity were found in the synthesis using water; at the same time, the positive effect of ozone on the coating uniformity was confirmed.Ozone as a replacement for water helps to increase the uniformity of the coating by about 10 times. Coatings obtained with ozone are moresimilar to lanthanum oxide, and those obtained with water are more similar to lanthanum hydroxide.

AB - This study investigated the problem of lanthanum oxide uniform growth by atomic layer deposition (ALD) using water as the oxygen reagent.Although water is the classic reagent for ALD, it can be the reason for some problems (e.g., nonuniformity) with hygroscopic oxides (such aslanthanum oxide). There are some ways to improve coating quality: increase the purge duration after the water pulse, increase the synthesistemperature with the water process, and replace the oxygen reagent (e.g., for ozone). In this work, ways to improve were studied in theprocesses of coating growth using La(iPrCp)3. Spectral ellipsometry was used to study the thickness of the coatings. X-ray photoelectronspectroscopy with argon ion etching was used to investigate the chemical composition. X-ray diffraction and x-ray reflectometry were used todefine structural properties. The influence of the purge duration after water and the reactor temperature was defined. The ALD parameters ofLa(iPrCp)3 and ozone were investigated. The dependence of coating characterization on oxygen reagent was researched. No improvements inuniformity were found in the synthesis using water; at the same time, the positive effect of ozone on the coating uniformity was confirmed.Ozone as a replacement for water helps to increase the uniformity of the coating by about 10 times. Coatings obtained with ozone are moresimilar to lanthanum oxide, and those obtained with water are more similar to lanthanum hydroxide.

U2 - 10.1116/6.0005037

DO - 10.1116/6.0005037

M3 - статья

VL - 44

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

SN - 0734-2101

IS - 1

M1 - 012401

ER -