Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique. / Schöning, M. J.; Schmidt, C.; Schubert, J.; Zander, W.; Mesters, S.; Kordos, P.; Lüth, H.; Legin, A.; Seleznev, B.; Vlasov, Yu G.
в: Sensors and Actuators, B: Chemical, Том 68, № 1, 25.08.2000, стр. 254-259.Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
}
TY - JOUR
T1 - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique
AU - Schöning, M. J.
AU - Schmidt, C.
AU - Schubert, J.
AU - Zander, W.
AU - Mesters, S.
AU - Kordos, P.
AU - Lüth, H.
AU - Legin, A.
AU - Seleznev, B.
AU - Vlasov, Yu G.
PY - 2000/8/25
Y1 - 2000/8/25
N2 - Potentiometric thin film sensors on the basis of the two different chalcogenide glass materials Ag-As-S and Cu-Ag-As-Se-Te have been prepared by means of the pulsed laser deposition (PLD) technique onto Si/SiO2 substrates with an additional contact layer of Cr/Au and Ti/Pt, respectively. The physical layer structure and the stoichiometric composition of the deposited glass materials have been investigated by means of Rutherford backscattering spectrometry (RBS) and transmission electron microscopy (TEM). Depending on the material systems used, in a conventional 'two-electrodes' measuring set-up, these novel thin film sensors posses a high sensitivity towards lead (23-25 mV/pPb), copper (29-31 mV/pCu), cadmium (23-27 mV/pCd) and silver (about 54 mV/pAg) over a measuring period of more than 60 days. The obtained results are in good accordance when comparing them to measurements performed with conventional bulk ion-selective electrodes, built-up of the same layer composition.
AB - Potentiometric thin film sensors on the basis of the two different chalcogenide glass materials Ag-As-S and Cu-Ag-As-Se-Te have been prepared by means of the pulsed laser deposition (PLD) technique onto Si/SiO2 substrates with an additional contact layer of Cr/Au and Ti/Pt, respectively. The physical layer structure and the stoichiometric composition of the deposited glass materials have been investigated by means of Rutherford backscattering spectrometry (RBS) and transmission electron microscopy (TEM). Depending on the material systems used, in a conventional 'two-electrodes' measuring set-up, these novel thin film sensors posses a high sensitivity towards lead (23-25 mV/pPb), copper (29-31 mV/pCu), cadmium (23-27 mV/pCd) and silver (about 54 mV/pAg) over a measuring period of more than 60 days. The obtained results are in good accordance when comparing them to measurements performed with conventional bulk ion-selective electrodes, built-up of the same layer composition.
UR - http://www.scopus.com/inward/record.url?scp=0342520802&partnerID=8YFLogxK
U2 - 10.1016/S0925-4005(00)00438-X
DO - 10.1016/S0925-4005(00)00438-X
M3 - Conference article
AN - SCOPUS:0342520802
VL - 68
SP - 254
EP - 259
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
SN - 0925-4005
IS - 1
T2 - Proceedings of Eurosensors XIII
Y2 - 12 September 1999 through 15 September 1999
ER -
ID: 30516580