Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Theoretical and Experimental Evaluation of the Electrical Parameters of a Holographic Microscope. / Egorov, N. V.; Antonova, L. I.; Karpov, A. G.; Trofimov, V. V.; Fedorov, A. G.
в: Journal of Surface Investigation, Том 14, № 5, 01.09.2020, стр. 1061-1065.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Theoretical and Experimental Evaluation of the Electrical Parameters of a Holographic Microscope
AU - Egorov, N. V.
AU - Antonova, L. I.
AU - Karpov, A. G.
AU - Trofimov, V. V.
AU - Fedorov, A. G.
N1 - Publisher Copyright: © 2020, Pleiades Publishing, Ltd. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/9/1
Y1 - 2020/9/1
N2 - Abstract: The presented system for the theoretical and experimental evaluation of images obtained in a holographic microscope can be directly used for the diagnostics of industrial products during the manufacturing process. It is found that controlling the positioning of the cathode–research object in a holographic microscope can be effectively carried out by monitoring the substrate current. The resolution of the coordinate-sensitive detector of the microscope is calculated to be 400−0.4 nm. It is shown that continuous monitoring of the conditions of experimental research is necessary to obtain an informative image because each object under study is essentially unique. Test studies of thin aluminum films are performed.
AB - Abstract: The presented system for the theoretical and experimental evaluation of images obtained in a holographic microscope can be directly used for the diagnostics of industrial products during the manufacturing process. It is found that controlling the positioning of the cathode–research object in a holographic microscope can be effectively carried out by monitoring the substrate current. The resolution of the coordinate-sensitive detector of the microscope is calculated to be 400−0.4 nm. It is shown that continuous monitoring of the conditions of experimental research is necessary to obtain an informative image because each object under study is essentially unique. Test studies of thin aluminum films are performed.
KW - electron in-line holography
KW - holographic microscope
KW - investigation of the three-dimensional atomic structure
KW - investigation of thin films
UR - http://www.scopus.com/inward/record.url?scp=85092785624&partnerID=8YFLogxK
U2 - 10.1134/S1027451020050250
DO - 10.1134/S1027451020050250
M3 - Article
AN - SCOPUS:85092785624
VL - 14
SP - 1061
EP - 1065
JO - ПОВЕРХНОСТЬ. РЕНТГЕНОВСКИЕ, СИНХРОТРОННЫЕ И НЕЙТРОННЫЕ ИССЛЕДОВАНИЯ
JF - ПОВЕРХНОСТЬ. РЕНТГЕНОВСКИЕ, СИНХРОТРОННЫЕ И НЕЙТРОННЫЕ ИССЛЕДОВАНИЯ
SN - 1027-4510
IS - 5
ER -
ID: 70170122