The article is dedicated to the analysis of the process of technology parks development in Russia. The object of research is the Russian technology parks as an element of the innovation infrastructure; the subject of research is the ecosystem of Russian technology parks. For the purposes of the study, the concept of “technology park structure” was introduced, which links together varieties of technology parks (or “technoparks”), and by which the authors mean a real or virtual form of business organization specializing in the provision of a package of services to innovation-oriented companies. In parallel with development of technology parks, the article traces formation of technopark ecosystem, which is interpreted by the authors as the unity of hard and soft elements of influence. The key stages of development of technopark structures in Russia are distinguished. The stages differ in their goals, objectives, content of the development process and in the types of technoparks that developed during certain periods. For each stage, the hard and the soft elements of technology park ecosystem are identified, and general conclusions containing the most important characteristics of each stage are drawn. Characteristics of the main institutional forms of technology parks, such as technoparks, innovation centers, business incubators, etc., are given. The dynamics of creation of technology parks in Russia for the period from 1990 to 2017 are analyzed. The main results of the activity of Russian technology parks residents for 2016 such as total revenues, total output of import-substituting products, etc. are presented