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Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method. / Zhuchkov, B. S.; Tolstoy, V. P.; Murin, I. V.

в: Solid State Ionics, Том 101-103, № PART 1, 01.01.1997, стр. 165-170.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Harvard

Zhuchkov, BS, Tolstoy, VP & Murin, IV 1997, 'Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method', Solid State Ionics, Том. 101-103, № PART 1, стр. 165-170.

APA

Zhuchkov, B. S., Tolstoy, V. P., & Murin, I. V. (1997). Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method. Solid State Ionics, 101-103(PART 1), 165-170.

Vancouver

Zhuchkov BS, Tolstoy VP, Murin IV. Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method. Solid State Ionics. 1997 Янв. 1;101-103(PART 1):165-170.

Author

Zhuchkov, B. S. ; Tolstoy, V. P. ; Murin, I. V. / Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method. в: Solid State Ionics. 1997 ; Том 101-103, № PART 1. стр. 165-170.

BibTeX

@article{144cc061ea97404faf0a255746fd1de2,
title = "Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method",
abstract = "The layer-by-layer synthesis of LaF3, ScF3 nanolayers was perfomed by SILD method. The growth kinetics of mentioned nanolayers was investigated by the ellipsometry method, their composition was explored by FTIR and XP spectroscopy, and the structure was stated by the electron diffraction method. The synthesis of the multilayers mScF3-nLaF3, where m and n are the numbers of SILD cycles, was performed in the determined optimal conditions.",
keywords = "Lanthanum fluoride, Multinanolayers, Nanolayers, Scandium fluoride",
author = "Zhuchkov, {B. S.} and Tolstoy, {V. P.} and Murin, {I. V.}",
year = "1997",
month = jan,
day = "1",
language = "English",
volume = "101-103",
pages = "165--170",
journal = "Solid State Ionics",
issn = "0167-2738",
publisher = "Elsevier",
number = "PART 1",

}

RIS

TY - JOUR

T1 - Synthesis of ScF3, LaF3 nanolayers and nLaF3-mScF3 multinanolayers at the surface of silicon by successive ionic layer deposition method

AU - Zhuchkov, B. S.

AU - Tolstoy, V. P.

AU - Murin, I. V.

PY - 1997/1/1

Y1 - 1997/1/1

N2 - The layer-by-layer synthesis of LaF3, ScF3 nanolayers was perfomed by SILD method. The growth kinetics of mentioned nanolayers was investigated by the ellipsometry method, their composition was explored by FTIR and XP spectroscopy, and the structure was stated by the electron diffraction method. The synthesis of the multilayers mScF3-nLaF3, where m and n are the numbers of SILD cycles, was performed in the determined optimal conditions.

AB - The layer-by-layer synthesis of LaF3, ScF3 nanolayers was perfomed by SILD method. The growth kinetics of mentioned nanolayers was investigated by the ellipsometry method, their composition was explored by FTIR and XP spectroscopy, and the structure was stated by the electron diffraction method. The synthesis of the multilayers mScF3-nLaF3, where m and n are the numbers of SILD cycles, was performed in the determined optimal conditions.

KW - Lanthanum fluoride

KW - Multinanolayers

KW - Nanolayers

KW - Scandium fluoride

UR - http://www.scopus.com/inward/record.url?scp=18244419383&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:18244419383

VL - 101-103

SP - 165

EP - 170

JO - Solid State Ionics

JF - Solid State Ionics

SN - 0167-2738

IS - PART 1

ER -

ID: 42175430