A possibility of preparing Bi₂O₃ and BiVO₄ nanolayers by ionic deposition on the silica surface was shown for the first time. The influence of the concentration and pH of reactant solutions and of the number of ionic deposition cycles on the kinetics of the nanolayer growth was studied. The conditions were determined for the formation of a nanolayer by a reaction in a layer of ions sorbed on the surface. The thickness of the synthesized layers was determined by ellipsometry. The layer compositions were studied by X-ray spectral microanalysis, X-ray photoelectron spectroscopy, and UV and IR Fourier transform spectroscopy. The structure of the layers was studied by powder X-ray diffraction.