TY - JOUR

T1 - Spectroscopical diagnostics of molecular microwave plasmas

AU - Röpcke, J.

AU - Käning, M.

AU - Lavrov, B. P.

PY - 1998/12/1

Y1 - 1998/12/1

N2 - The paper presents a review of recent results of emission (UV/visible) and absorption (visible and IR) spectroscopical investigations in molecular tube and planar microwave discharges. As a new approach by emission spectroscopy seven band systems of the hydrogen molecule have been analysed to investigate H2 radiative characteristics and to determine the gas temperature completed by Doppler broadening measurements of Hα, Dα and H2 spectral lines. H2 dissociation continuum was used for an estimation of the radiative dissociation rate/degree. By absorption spectroscopy the populations of 4s ArI levels and concentrations of hydrocarbons (e.g. CH3, C2H2, CH4) were determined. In particular, investigations were focused on spatial distributions of plasma parameters.

AB - The paper presents a review of recent results of emission (UV/visible) and absorption (visible and IR) spectroscopical investigations in molecular tube and planar microwave discharges. As a new approach by emission spectroscopy seven band systems of the hydrogen molecule have been analysed to investigate H2 radiative characteristics and to determine the gas temperature completed by Doppler broadening measurements of Hα, Dα and H2 spectral lines. H2 dissociation continuum was used for an estimation of the radiative dissociation rate/degree. By absorption spectroscopy the populations of 4s ArI levels and concentrations of hydrocarbons (e.g. CH3, C2H2, CH4) were determined. In particular, investigations were focused on spatial distributions of plasma parameters.

UR - http://www.scopus.com/inward/record.url?scp=0032181468&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0032181468

VL - 8

JO - Journal De Physique

JF - Journal De Physique

SN - 1951-6355

IS - 7

ER -