The modern vertex detectors based on silicon sensors (tracking systems of leading experiments at the Large Hadron Collider and vertex detectors of the MPD and SPD experiments at the NICA accelerator complex) are discussed. The development of concepts for new detector systems using thin silicon pixel detectors for the precision identification of charmed hadrons decay vertices is considered. Results from developing cooling systems for large-area ultrathin silicon detector modules and studies of the properties and characteristics of silicon pixel sensors based on CMOS technology are presented in the context of detecting rare decays of hadrons containing heavy quarks.