TY - JOUR

T1 - Self-consistent model of high current density segmented hollow cathode discharges

AU - Arslanbekov, R. R.

AU - Tobin, R. C.

AU - Kudryavtsev, A. A.

PY - 1997/1/15

Y1 - 1997/1/15

N2 - A two-dimensional model of the hollow cathode and the high-voltage segmented hollow cathode sputtering discharges at high current densities is presented. The main plasma parameters (e.g., complete electron distribution function, spatial distributions of particle densities, gas temperature, etc.) are determined self-consistently. The most important mechanisms contributing to the operating characteristics of these hollow cathode discharges are identified and described quantitatively. The most representative hollow cathode configurations are analyzed and the results are compared to existing experimental data for the helium-argon-copper system, e.g., voltage-current characteristics, density of copper atoms as a function of the discharge current, and percentage argon. Good agreement is found between model predictions and experimental results. The model can be adapted to other high-voltage variants of the hollow cathode discharges.

AB - A two-dimensional model of the hollow cathode and the high-voltage segmented hollow cathode sputtering discharges at high current densities is presented. The main plasma parameters (e.g., complete electron distribution function, spatial distributions of particle densities, gas temperature, etc.) are determined self-consistently. The most important mechanisms contributing to the operating characteristics of these hollow cathode discharges are identified and described quantitatively. The most representative hollow cathode configurations are analyzed and the results are compared to existing experimental data for the helium-argon-copper system, e.g., voltage-current characteristics, density of copper atoms as a function of the discharge current, and percentage argon. Good agreement is found between model predictions and experimental results. The model can be adapted to other high-voltage variants of the hollow cathode discharges.

UR - http://www.scopus.com/inward/record.url?scp=0001584365&partnerID=8YFLogxK

U2 - 10.1063/1.364198

DO - 10.1063/1.364198

M3 - Article

AN - SCOPUS:0001584365

VL - 81

SP - 554

EP - 568

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 2

ER -