The theories, modeling and experiments of the processes of secondary electron (SE) generation and SE usage in helium ion microscopy (HIM) are reviewed and discussed. Conventional and recently introduced SE imaging modes in HIM utilizing SE energy filtering and ion-to-SE conversion, such as scanning transmission ion microscopy and reflection ion microscopy, are described.
Язык оригиналаанглийский
Название основной публикацииHelium Ion Microscopy
РедакторыGregor Hlawacek, Armin Gölzhäuser
ИздательSpringer Nature
Страницы119-146
ISBN (электронное издание)978-3-319-41990-9
ISBN (печатное издание)978-3-319-41988-6
DOI
СостояниеОпубликовано - 2016

Серия публикаций

Название NanoScience and Technology

ID: 7599765