By the method of saturation of absorption of counterpropagating light waves, the gas-phase spectrum of SiF₄ is obtained without Doppler broadening of spectral lines. In the frequency range of the generation of a low-pressure CO₂ laser (the 9.4-μm band), multiplets of the superfine structure (associated with tunneling transitions between the states of rotation about the equivalent symmetry axes of the SiF₄ molecule) of the spectrum were observed. Weak satellites were observed in the vicinity of the multiplets. Some of the satellites were interpreted as resonances formed by the collisional transfer of the three-photon Bennett holes and peaks.