Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Recombination activity and electrical levels of "clean" and copper contaminated dislocations in p-type Si. / Vyvenko, O. F.; Kittler, M.; Seifert, W.; Trushin, M. V.
в: Physica Status Solidi C: Conferences, Том 2, № 6, 2005, стр. 1852-1858.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Recombination activity and electrical levels of "clean" and copper contaminated dislocations in p-type Si
AU - Vyvenko, O. F.
AU - Kittler, M.
AU - Seifert, W.
AU - Trushin, M. V.
PY - 2005
Y1 - 2005
N2 - Deep levels, associated with misfit dislocations in "clean" and copper contaminated p-type Si/Si0.98Ge0.02/Si structures, are under consideration. In the as-grown (non-contaminated) samples dislocations were found to exhibit a very low recombination activity, detectable with the electron-beam-induced current technique only at low temperatures. Deep-level-transient spectroscopy revealed a dislocation-related hole trap level at Et = Ev + 0.2 eV which was identified as band-like. The position of the observed level is close to the theoretically predicted hole trap state of the intrinsic stacking fault between a dissociated dislocation. Contamination with a low copper concentration (5 ppb) gave rise to a large increase of the recombination activity of the dislocations and to the appearance of another dislocation-related defect level at Et= Ev+ 0.32 eV. Hydrogenation of the copper contaminated sample by a treatment with an acid solution and subsequent reverse-bias anneal at 380 K resulted in the evolution of the levels of substitutional copper and its complexes with hydrogen.
AB - Deep levels, associated with misfit dislocations in "clean" and copper contaminated p-type Si/Si0.98Ge0.02/Si structures, are under consideration. In the as-grown (non-contaminated) samples dislocations were found to exhibit a very low recombination activity, detectable with the electron-beam-induced current technique only at low temperatures. Deep-level-transient spectroscopy revealed a dislocation-related hole trap level at Et = Ev + 0.2 eV which was identified as band-like. The position of the observed level is close to the theoretically predicted hole trap state of the intrinsic stacking fault between a dissociated dislocation. Contamination with a low copper concentration (5 ppb) gave rise to a large increase of the recombination activity of the dislocations and to the appearance of another dislocation-related defect level at Et= Ev+ 0.32 eV. Hydrogenation of the copper contaminated sample by a treatment with an acid solution and subsequent reverse-bias anneal at 380 K resulted in the evolution of the levels of substitutional copper and its complexes with hydrogen.
UR - http://www.scopus.com/inward/record.url?scp=27444432559&partnerID=8YFLogxK
U2 - 10.1002/pssc.200460517
DO - 10.1002/pssc.200460517
M3 - Article
AN - SCOPUS:27444432559
VL - 2
SP - 1852
EP - 1858
JO - Physica Status Solidi C: Conferences
JF - Physica Status Solidi C: Conferences
SN - 1862-6351
IS - 6
ER -
ID: 87674668