Standard

Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor. / Monakhov, V. V.; Utkin, A. B.

в: Technical Physics, Том 44, № 3, 01.03.1999, стр. 300-302.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Harvard

Monakhov, VV & Utkin, AB 1999, 'Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor', Technical Physics, Том. 44, № 3, стр. 300-302.

APA

Monakhov, V. V., & Utkin, A. B. (1999). Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor. Technical Physics, 44(3), 300-302.

Vancouver

Monakhov VV, Utkin AB. Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor. Technical Physics. 1999 Март 1;44(3):300-302.

Author

Monakhov, V. V. ; Utkin, A. B. / Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor. в: Technical Physics. 1999 ; Том 44, № 3. стр. 300-302.

BibTeX

@article{e39c75128085483d87959b41b890b558,
title = "Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor",
abstract = "An easily implemented method for measuring the capacitance of semiconductor structures using small-amplitude current pulses is described. It is shown that the accuracy of the method described can be improved significantly when a ballast capacitor is employed and, in addition, a calibration procedure is performed. The influence of the ballast capacitor on the measurement process is analyzed in detail.",
author = "Monakhov, {V. V.} and Utkin, {A. B.}",
year = "1999",
month = mar,
day = "1",
language = "English",
volume = "44",
pages = "300--302",
journal = "Technical Physics",
issn = "1063-7842",
publisher = "Pleiades Publishing",
number = "3",

}

RIS

TY - JOUR

T1 - Pulsed method for measuring the capacitance of semiconductor structures using a ballast capacitor

AU - Monakhov, V. V.

AU - Utkin, A. B.

PY - 1999/3/1

Y1 - 1999/3/1

N2 - An easily implemented method for measuring the capacitance of semiconductor structures using small-amplitude current pulses is described. It is shown that the accuracy of the method described can be improved significantly when a ballast capacitor is employed and, in addition, a calibration procedure is performed. The influence of the ballast capacitor on the measurement process is analyzed in detail.

AB - An easily implemented method for measuring the capacitance of semiconductor structures using small-amplitude current pulses is described. It is shown that the accuracy of the method described can be improved significantly when a ballast capacitor is employed and, in addition, a calibration procedure is performed. The influence of the ballast capacitor on the measurement process is analyzed in detail.

UR - http://www.scopus.com/inward/record.url?scp=0033247162&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0033247162

VL - 44

SP - 300

EP - 302

JO - Technical Physics

JF - Technical Physics

SN - 1063-7842

IS - 3

ER -

ID: 37032481