DOI

We developed and tested 2D “extended fluid model” of a dc glow discharge using COMSOL MULTIPHYSICS software and implemented two different approaches. First, assembling the model from COMSOL’s general form pde’s and, second, using COMSOL’s built-in Plasma Module. The discharge models are based on the fluid description of ions and excited neutral species and use drift-diffusion approximation for the particle fluxes. The electron transport as well as the rates of electron-induced plasma-chemical reactions are calculated using the Boltzmann equation for the EEDF and corresponding collision cross-sections. The self-consistent electric field is calculated from the Poisson equation. Basic discharge plasma properties such as current-voltage characteristics and electron and ion spatial density distributions as well as electron temperature and electric field profiles were studied. While the solutions obtained by two different COMSOL models are essentially identical, the discrepancy between COMSOL and CFD-ACE+ model sol
Язык оригиналаанглийский
Страницы (с-по)033502_1-12
ЖурналPhysics of Plasmas
Том19
Номер выпуска3
DOI
СостояниеОпубликовано - 2012

ID: 5292452