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Model Approach to Solving the Inverse Problem of X-Ray Reflectometry and Its Application to the Study of the Internal Structure of Hafnium Oxide Films. / Volkov, Yu. O.; Kozhevnikov, I. V.; Roshchin, B. S.; Filatova, E. O.; Asadchikov, V. E.

в: Crystallography Reports, Том 58, № 1, 2013, стр. 160-167.

Результаты исследований: Научные публикации в периодических изданияхстатья

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Volkov, Yu. O. ; Kozhevnikov, I. V. ; Roshchin, B. S. ; Filatova, E. O. ; Asadchikov, V. E. / Model Approach to Solving the Inverse Problem of X-Ray Reflectometry and Its Application to the Study of the Internal Structure of Hafnium Oxide Films. в: Crystallography Reports. 2013 ; Том 58, № 1. стр. 160-167.

BibTeX

@article{dbd4699dc43b4edd8c47d785a4104d84,
title = "Model Approach to Solving the Inverse Problem of X-Ray Reflectometry and Its Application to the Study of the Internal Structure of Hafnium Oxide Films",
author = "Volkov, {Yu. O.} and Kozhevnikov, {I. V.} and Roshchin, {B. S.} and Filatova, {E. O.} and Asadchikov, {V. E.}",
year = "2013",
doi = "10.1134/S1063774513010148",
language = "English",
volume = "58",
pages = "160--167",
journal = "Crystallography Reports",
issn = "1063-7745",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "1",

}

RIS

TY - JOUR

T1 - Model Approach to Solving the Inverse Problem of X-Ray Reflectometry and Its Application to the Study of the Internal Structure of Hafnium Oxide Films

AU - Volkov, Yu. O.

AU - Kozhevnikov, I. V.

AU - Roshchin, B. S.

AU - Filatova, E. O.

AU - Asadchikov, V. E.

PY - 2013

Y1 - 2013

U2 - 10.1134/S1063774513010148

DO - 10.1134/S1063774513010148

M3 - Article

VL - 58

SP - 160

EP - 167

JO - Crystallography Reports

JF - Crystallography Reports

SN - 1063-7745

IS - 1

ER -

ID: 5743033