TY - JOUR

T1 - Main scenarios of spatial distribution of charged and neutral components in SF6 plasma

AU - Bogdanov, E.A.

AU - Kudryavtsev, A.A.

AU - Ochikova, Z.S.

PY - 2013

Y1 - 2013

N2 - Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.

AB - Numerical modeling and theoretical analyses of spatial distribution with detailed set of plasmachemical processes in elegas have been made for a wide range of pressures. Evolution of main charged and neutral particles in time and space has been obtained. It is shown that at low pressures, the Boltzmann distribution holds for both electrons and negative ions and separation of the plasma into two regions with an almost flat profile of the electron density. At high pressures, electronegativity of plasma is extremely high and the self-consistent electric field is determined not only by the electrons, as in the conventional plasma, but also by the ions of both signs. This leads to an abnormally small potential drop in the plasma and nonmonotonic ion profiles.

U2 - 10.1109/TPS.2013.2278839

DO - 10.1109/TPS.2013.2278839

M3 - Article

VL - 41

SP - 3254

EP - 3267

JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

SN - 0093-3813

IS - 12

ER -