Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Magnification of interferogram with the use of digital holography. / Ivanov, Vladimir; Pul'Kin, Sergey; Sevryugin, Alexander; Venediktov, Vladimir.
Proceedings - 2014 International Conference Laser Optics, LO 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 6886309 (Proceedings - 2014 International Conference Laser Optics, LO 2014).Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
}
TY - GEN
T1 - Magnification of interferogram with the use of digital holography
AU - Ivanov, Vladimir
AU - Pul'Kin, Sergey
AU - Sevryugin, Alexander
AU - Venediktov, Vladimir
PY - 2014
Y1 - 2014
N2 - The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.
AB - The method of holographic interferometry with the increased sensitivity was applied for measurements of height of nano-steps (from 10 nm and higher) with standard uncertainty about 0.5 nm. The increasing of sensitivity is obtained by interference of waves with mutually complex conjugated phases.
KW - dynamic holography
KW - holographic intereferometry
KW - liquid crystal
KW - spatial light modulator
UR - http://www.scopus.com/inward/record.url?scp=84906979457&partnerID=8YFLogxK
U2 - 10.1109/LO.2014.6886309
DO - 10.1109/LO.2014.6886309
M3 - Conference contribution
SN - 9781479938858
T3 - Proceedings - 2014 International Conference Laser Optics, LO 2014
BT - Proceedings - 2014 International Conference Laser Optics, LO 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 International Conference Laser Optics, LO 2014
Y2 - 30 June 2014 through 4 July 2014
ER -
ID: 4743153