Joint Analysis of Cathodoluminescence and Electroluminescence of SiO2 Layers on Silicon

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Joint Analysis of Cathodoluminescence and Electroluminescence of SiO2 Layers on Silicon. / Барабан, Александр Петрович ; Дмитриев, Валентин Александрович ; Габис, Игорь Евгеньевич ; Петров, Юрий Владимирович; Прокофьев, В.А.

в: OPTICS AND SPECTROSCOPY, Том 130, № 4, 04.2022, стр. 239-243.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

BibTeX

@article{13c382573d304b50ab3771587f5849de,

title = "Joint Analysis of Cathodoluminescence and Electroluminescence of SiO2 Layers on Silicon",

abstract = "Abstract: The possibility of obtaining additional information on the properties of Si–SiO 2 structures from joint analysis of the electroluminescence and cathodoluminescence spectra in the spectral range of 250–800 nm is shown. It is found that the concentration of luminescent centers responsible for the 2.2-eV band is independent from the final thickness of the oxide layer and the centers are uniformly distributed over the SiO 2 thickness. It is shown that the luminescent centers responsible for the 4.2-eV band are characterized by a nonuniform distribution and form mainly in the outer part of the oxide layer (~30 nm) in amount proportional to the square root of the thermal oxidation time, which makes it possible to relate their formation to diffusion of oxidant components. ",

keywords = "cathodoluminescence, electroluminescence, luminescent centers, spectral distribution",

author = "Барабан, {Александр Петрович} and Дмитриев, {Валентин Александрович} and Габис, {Игорь Евгеньевич} and Петров, {Юрий Владимирович} and В.А Прокофьев",

note = "Publisher Copyright: {\textcopyright} 2022, Pleiades Publishing, Ltd.",

year = "2022",

month = apr,

doi = "10.1134/s0030400x22040026",

language = "English",

volume = "130",

pages = "239--243",

journal = "OPTICS AND SPECTROSCOPY",

issn = "0030-400X",

publisher = "Pleiades Publishing",

number = "4",

}

RIS

TY - JOUR

T1 - Joint Analysis of Cathodoluminescence and Electroluminescence of SiO2 Layers on Silicon

AU - Барабан, Александр Петрович

AU - Дмитриев, Валентин Александрович

AU - Габис, Игорь Евгеньевич

AU - Петров, Юрий Владимирович

AU - Прокофьев, В.А

PY - 2022/4

Y1 - 2022/4

N2 - Abstract: The possibility of obtaining additional information on the properties of Si–SiO 2 structures from joint analysis of the electroluminescence and cathodoluminescence spectra in the spectral range of 250–800 nm is shown. It is found that the concentration of luminescent centers responsible for the 2.2-eV band is independent from the final thickness of the oxide layer and the centers are uniformly distributed over the SiO 2 thickness. It is shown that the luminescent centers responsible for the 4.2-eV band are characterized by a nonuniform distribution and form mainly in the outer part of the oxide layer (~30 nm) in amount proportional to the square root of the thermal oxidation time, which makes it possible to relate their formation to diffusion of oxidant components.

AB - Abstract: The possibility of obtaining additional information on the properties of Si–SiO 2 structures from joint analysis of the electroluminescence and cathodoluminescence spectra in the spectral range of 250–800 nm is shown. It is found that the concentration of luminescent centers responsible for the 2.2-eV band is independent from the final thickness of the oxide layer and the centers are uniformly distributed over the SiO 2 thickness. It is shown that the luminescent centers responsible for the 4.2-eV band are characterized by a nonuniform distribution and form mainly in the outer part of the oxide layer (~30 nm) in amount proportional to the square root of the thermal oxidation time, which makes it possible to relate their formation to diffusion of oxidant components.

KW - cathodoluminescence

KW - electroluminescence

KW - luminescent centers

KW - spectral distribution

UR - http://www.scopus.com/inward/record.url?scp=85137466263&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/d8bd6856-92b1-3189-9013-258e25fc6d3f/

U2 - 10.1134/s0030400x22040026

DO - 10.1134/s0030400x22040026

M3 - Article

VL - 130

SP - 239

EP - 243

JO - OPTICS AND SPECTROSCOPY

JF - OPTICS AND SPECTROSCOPY

SN - 0030-400X

IS - 4

ER -

ID: 100226481