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Ion energy distribution function in the wall layer at a negative wall potential with respect to the plasma. / Sukhomlinov, Vladimir S.; Mustafaev, Alexander S.; Murillo, Oskar.
в: Physics of Plasmas, Том 25, № 1, 013513, 2018.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Ion energy distribution function in the wall layer at a negative wall potential with respect to the plasma
AU - Sukhomlinov, Vladimir S.
AU - Mustafaev, Alexander S.
AU - Murillo, Oskar
PY - 2018
Y1 - 2018
N2 - On the basis of the kinetic approach, the self-consistent problem of the gas discharge ion distribution function in the sheath near a surface at a negative potential with respect to the plasma is solved. For the first time, the solution takes into account the dependence of the ion charge exchange cross section from the atom on the ion energy, as well as the real ion distribution function in the unperturbed plasma. It is shown that the dependence of the charge exchange cross section on the ion energy significantly affects the shape of the ion distribution function. It is found that the mean energy of the ions near the wall depends on the electron mean energy in the unperturbed plasma. It was also found that, at the same electron mean energy, the form of the distribution function has practically no effect on the ion distribution function in the wall sheath. The calculations are in good agreement with the known mass spectrometric measurements of the ion distribution function. The obtained results give an opportunity to develop a self-consistent solution of the wall layer structure problem including the quasi-neutral presheath.
AB - On the basis of the kinetic approach, the self-consistent problem of the gas discharge ion distribution function in the sheath near a surface at a negative potential with respect to the plasma is solved. For the first time, the solution takes into account the dependence of the ion charge exchange cross section from the atom on the ion energy, as well as the real ion distribution function in the unperturbed plasma. It is shown that the dependence of the charge exchange cross section on the ion energy significantly affects the shape of the ion distribution function. It is found that the mean energy of the ions near the wall depends on the electron mean energy in the unperturbed plasma. It was also found that, at the same electron mean energy, the form of the distribution function has practically no effect on the ion distribution function in the wall sheath. The calculations are in good agreement with the known mass spectrometric measurements of the ion distribution function. The obtained results give an opportunity to develop a self-consistent solution of the wall layer structure problem including the quasi-neutral presheath.
KW - GLOW-DISCHARGE
KW - HOLLOW-CATHODE
KW - SHEATH TRANSITION
KW - MASS-ENERGY
UR - http://www.scopus.com/inward/record.url?scp=85041360110&partnerID=8YFLogxK
UR - http://www.mendeley.com/research/ion-energy-distribution-function-wall-layer-negative-wall-potential-respect-plasma
U2 - 10.1063/1.5017309
DO - 10.1063/1.5017309
M3 - Article
AN - SCOPUS:85041360110
VL - 25
JO - Physics of Plasmas
JF - Physics of Plasmas
SN - 1070-664X
IS - 1
M1 - 013513
ER -
ID: 35367659