Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
High-temperature annealing of bulk GaN layers. / Bessolov, V. N.; Zhilyaev, Yu V.; Kompan, M. E.; Konenkova, E. V.; Kukushkin, S. A.; Mesh, M. V.; Raevskiǐ, S. D.; Fradkov, A. L.; Fedirko, V. A.
в: Technical Physics Letters, Том 28, № 12, 01.12.2002, стр. 994-996.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - High-temperature annealing of bulk GaN layers
AU - Bessolov, V. N.
AU - Zhilyaev, Yu V.
AU - Kompan, M. E.
AU - Konenkova, E. V.
AU - Kukushkin, S. A.
AU - Mesh, M. V.
AU - Raevskiǐ, S. D.
AU - Fradkov, A. L.
AU - Fedirko, V. A.
PY - 2002/12/1
Y1 - 2002/12/1
N2 - The influence of high-temperature (1010°C) annealing in a flow of gaseous ammonia on the properties of bulk GaN layers, grown by chloride-hydride VPE and then separated from SiO2 substrates, was studied using atomic force microscopy. The bulk (∼360-μm-thick) epitaxial GaN layers were synthesized in two steps: a first stage of nucleation and growth at a low temperature (530°C) followed by epitaxy at a high temperature (970°C). It was found that the annealing increases the nanorelief height and activates the donor-acceptor recombination on the surface of a GaN layer grown at the lower temperature and decreases the intensity of photoluminescence from the layer grown at the higher temperature.
AB - The influence of high-temperature (1010°C) annealing in a flow of gaseous ammonia on the properties of bulk GaN layers, grown by chloride-hydride VPE and then separated from SiO2 substrates, was studied using atomic force microscopy. The bulk (∼360-μm-thick) epitaxial GaN layers were synthesized in two steps: a first stage of nucleation and growth at a low temperature (530°C) followed by epitaxy at a high temperature (970°C). It was found that the annealing increases the nanorelief height and activates the donor-acceptor recombination on the surface of a GaN layer grown at the lower temperature and decreases the intensity of photoluminescence from the layer grown at the higher temperature.
UR - http://www.scopus.com/inward/record.url?scp=0036953592&partnerID=8YFLogxK
U2 - 10.1134/1.1535513
DO - 10.1134/1.1535513
M3 - Article
AN - SCOPUS:0036953592
VL - 28
SP - 994
EP - 996
JO - Technical Physics Letters
JF - Technical Physics Letters
SN - 1063-7850
IS - 12
ER -
ID: 37780825