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Helium-ion microscope as a tool for gentle modification on the nanoscale. / Vyvenko, Oleg.

Springer Series in Chemical Physics. Springer Nature, 2017. стр. 279-284 (Springer Series in Chemical Physics; Том 115).

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Harvard

Vyvenko, O 2017, Helium-ion microscope as a tool for gentle modification on the nanoscale. в Springer Series in Chemical Physics. Springer Series in Chemical Physics, Том. 115, Springer Nature, стр. 279-284. https://doi.org/10.1007/978-3-319-52431-3_27

APA

Vyvenko, O. (2017). Helium-ion microscope as a tool for gentle modification on the nanoscale. в Springer Series in Chemical Physics (стр. 279-284). (Springer Series in Chemical Physics; Том 115). Springer Nature. https://doi.org/10.1007/978-3-319-52431-3_27

Vancouver

Vyvenko O. Helium-ion microscope as a tool for gentle modification on the nanoscale. в Springer Series in Chemical Physics. Springer Nature. 2017. стр. 279-284. (Springer Series in Chemical Physics). https://doi.org/10.1007/978-3-319-52431-3_27

Author

Vyvenko, Oleg. / Helium-ion microscope as a tool for gentle modification on the nanoscale. Springer Series in Chemical Physics. Springer Nature, 2017. стр. 279-284 (Springer Series in Chemical Physics).

BibTeX

@inbook{3acdf384ebbb41c5aca9e28de2353de1,
title = "Helium-ion microscope as a tool for gentle modification on the nanoscale",
abstract = "The most pronounced differences in material properties between the massive and nano sized object appear when one of its dimensions becomes typically less than 10 nm and experimental techniques for the characterization and modification of such objects are needed. The chapter contains a short introduction into helium ion microscopy as a tool for sub-nm imaging and for sub-10-nm “wet” and “dry” lithography.",
author = "Oleg Vyvenko",
year = "2017",
month = jan,
day = "1",
doi = "10.1007/978-3-319-52431-3_27",
language = "English",
series = "Springer Series in Chemical Physics",
publisher = "Springer Nature",
pages = "279--284",
booktitle = "Springer Series in Chemical Physics",
address = "Germany",

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RIS

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AB - The most pronounced differences in material properties between the massive and nano sized object appear when one of its dimensions becomes typically less than 10 nm and experimental techniques for the characterization and modification of such objects are needed. The chapter contains a short introduction into helium ion microscopy as a tool for sub-nm imaging and for sub-10-nm “wet” and “dry” lithography.

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