FTIR spectra of ozone adsorbed at 77 K on a number of oxide adsorbents were investigated. Special attention was paid to the position and isotopic splitting of the band of ν₁₊₃ combination vibration. For titania eight distinct bands were distinguished and put in correspondence with the bands of ν₁ and ν₃ vibrations. Chemisorption is accompanied by the frequency increase of the combination band mostly at the expense of decreased anharmonicity. Besides TiO₂ and CeO₂, ozone chemisorption with the blue shifted ν₁₊₃ band was found for BeO and some cation-exchanged zeolites, while for Al₂O₃ and ZnO only physisorbed molecules were detected.