TY - JOUR

T1 - From V. B. Aleskovskii’s “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition

AU - Malygin, A.A.

AU - Drozd, V.E.

AU - Malkov, A.A.

AU - Smirnov, V.M.

PY - 2015

Y1 - 2015

N2 - This essay is dedicated to the history of creation and development of the molecular layering technique (ML) which, in the modern community of non-Russian scientists, is commonly referred to as atomic layer deposition (ALD). Basic research in the field of chemical transformations of solid surfaces using the ML method in the light of the “framework” hypothesis proposed by V. B. Aleskovskii in 1952 is discussed. A number of questions raised by international scientists including those involved in the Virtual Project on the History of ALD (VPHA, 2013), and scientists from conferences in Helsinki (Finland, May 2014.), Kyoto (Japan, June 2014), and personal communications amongst peers are addressed. For the first time in English, this article provides information about V. B. Aleskovskii and S. I. Kol’tsov who are closely associated with development of the ML technique in the Soviet Union. This paper also informs the scientific community about research groups currently engaged in ML research in Russia and introduces

AB - This essay is dedicated to the history of creation and development of the molecular layering technique (ML) which, in the modern community of non-Russian scientists, is commonly referred to as atomic layer deposition (ALD). Basic research in the field of chemical transformations of solid surfaces using the ML method in the light of the “framework” hypothesis proposed by V. B. Aleskovskii in 1952 is discussed. A number of questions raised by international scientists including those involved in the Virtual Project on the History of ALD (VPHA, 2013), and scientists from conferences in Helsinki (Finland, May 2014.), Kyoto (Japan, June 2014), and personal communications amongst peers are addressed. For the first time in English, this article provides information about V. B. Aleskovskii and S. I. Kol’tsov who are closely associated with development of the ML technique in the Soviet Union. This paper also informs the scientific community about research groups currently engaged in ML research in Russia and introduces

KW - ALD

KW - molecular layering

KW - history

KW - “framework” hypothesis

U2 - 10.1002/cvde.201502013

DO - 10.1002/cvde.201502013

M3 - Literature review

VL - 21

SP - 216

EP - 240

JO - Chemical Vapor Deposition

JF - Chemical Vapor Deposition

SN - 0948-1907

ER -