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Formation of oligomer species in the course of the TiCl4 ammonolysis and their role in Ti(IV)-Ti(III) reduction processes : A theoretical study. / Timoshkin, A. Y.; Siodmiak, M.; Korkin, A. A.; Frenking, G.
в: Computational Materials Science, Том 27, № 1-2, 03.2003, стр. 109-116.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Formation of oligomer species in the course of the TiCl4 ammonolysis and their role in Ti(IV)-Ti(III) reduction processes
T2 - A theoretical study
AU - Timoshkin, A. Y.
AU - Siodmiak, M.
AU - Korkin, A. A.
AU - Frenking, G.
PY - 2003/3
Y1 - 2003/3
N2 - Gas phase oligomer formation during TiCl4 ammonolysis is theoretically investigated at the DFT B3LYP level of theory with double-ζ quality basis set. Several possible isomers of the dimeric [TiClxNHx-1(NH3)n]2 species (x=3, 2; n=0, 1) have been considered. Dimerization of amido compounds is exothermic by about 10 kcalmol-1, but disfavored by entropy. The latter factor prevents the existence of the amido dimers in the gas phase thermodynamic equilibrium. The dimerization processes of imido compounds are much more exothermic (by about 94 kcalmol-1). A cubic [ClTiN]4 cluster is predicted to be a viable molecular form in the gas phase above 1400 °C. Reduction of Ti(IV) to Ti(III) via hydrazine formation from the [TiCl3NH2(NH3)]2 dimers is less endothermic (∼40 kcalmol-1) than Ti-Cl bond rupture (∼82.5 kcalmol-1). The overall endothermicity of the formation of N2H4 bridged Ti(III) dimer [Cl2(H3N)Ti(μ-Cl)2(μ-N2H4 )Ti(NH3)Cl2] from TiCl4 and NH3 is only 6.6 kcalmol-1. Additional coordination of two ammonia molecules to the [Cl3TiNH2]2 dimer facilitates the elimination of Cl atom.
AB - Gas phase oligomer formation during TiCl4 ammonolysis is theoretically investigated at the DFT B3LYP level of theory with double-ζ quality basis set. Several possible isomers of the dimeric [TiClxNHx-1(NH3)n]2 species (x=3, 2; n=0, 1) have been considered. Dimerization of amido compounds is exothermic by about 10 kcalmol-1, but disfavored by entropy. The latter factor prevents the existence of the amido dimers in the gas phase thermodynamic equilibrium. The dimerization processes of imido compounds are much more exothermic (by about 94 kcalmol-1). A cubic [ClTiN]4 cluster is predicted to be a viable molecular form in the gas phase above 1400 °C. Reduction of Ti(IV) to Ti(III) via hydrazine formation from the [TiCl3NH2(NH3)]2 dimers is less endothermic (∼40 kcalmol-1) than Ti-Cl bond rupture (∼82.5 kcalmol-1). The overall endothermicity of the formation of N2H4 bridged Ti(III) dimer [Cl2(H3N)Ti(μ-Cl)2(μ-N2H4 )Ti(NH3)Cl2] from TiCl4 and NH3 is only 6.6 kcalmol-1. Additional coordination of two ammonia molecules to the [Cl3TiNH2]2 dimer facilitates the elimination of Cl atom.
KW - Chemical vapor deposition
KW - Modelling
KW - Oligomerization reactions
KW - Quantum chemistry
KW - TiN
UR - http://www.scopus.com/inward/record.url?scp=0037370123&partnerID=8YFLogxK
U2 - 10.1016/S0927-0256(02)00433-0
DO - 10.1016/S0927-0256(02)00433-0
M3 - Article
AN - SCOPUS:0037370123
VL - 27
SP - 109
EP - 116
JO - Computational Materials Science
JF - Computational Materials Science
SN - 0927-0256
IS - 1-2
ER -
ID: 17373503