Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow. / Fedoseeva, Yu V.; Pozdnyakov, G. A.; Okotrub, A. V.; Kanygin, M. A.; Nastaushev, Yu V.; Vilkov, O. Y.; Bulusheva, L. G.
в: Applied Surface Science, Том 385, 2016, стр. 464-471.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Effect of substrate temperature on the structure of amorphous oxygenated hydrocarbon films grown with a pulsed supersonic methane plasma flow
AU - Fedoseeva, Yu V.
AU - Pozdnyakov, G. A.
AU - Okotrub, A. V.
AU - Kanygin, M. A.
AU - Nastaushev, Yu V.
AU - Vilkov, O. Y.
AU - Bulusheva, L. G.
PY - 2016
Y1 - 2016
N2 - Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.
AB - Since amorphous oxygenated hydrocarbon (COxHy) films are promising engineering materials a study of the structure and composition of the films depending on the conditions of synthesis is important for controlling of their physicochemical properties. Here, we used the methods of scanning and transmission electron microscopy, X-ray photoelectron, near-edge X-ray absorption fine structure, Fourier transform infrared and Raman spectroscopy to reveal changes in the chemical connectivity of COxHy films grown on silicon substrates heated to 300, 500, and 700 °C using a supersonic flow of methane plasma. It was found that the COxHy films, deposited at 300 and 500 °C, were mainly composed of the sp2-hybridized carbon areas with various oxygen species. A rise of the substrate temperature caused an increase of the portion of tetrahedral carbon atoms as well as carboxyl and hydroxyl groups. With growth of the substrate temperature, the film thickness reduced monotonically from 400 to 180 nm, while the film adhesion improved substantially. The films, deposited at lower temperatures, showed high hydrophilicity due to porosity and presence of oxygenated groups both at the surface and in the bulk.
KW - NEXAFS
KW - Oxygenated hydrocarbon films
KW - Supersonic plasma flow deposition
KW - XPS
UR - http://www.scopus.com/inward/record.url?scp=84973340121&partnerID=8YFLogxK
U2 - 10.1016/j.apsusc.2016.05.120
DO - 10.1016/j.apsusc.2016.05.120
M3 - Article
AN - SCOPUS:84973340121
VL - 385
SP - 464
EP - 471
JO - Applied Surface Science
JF - Applied Surface Science
SN - 0169-4332
ER -
ID: 9286173