DOI

  • Yu G. Mourzina
  • J. Schubert
  • W. Zander
  • A. Legin
  • Yu G. Vlasov
  • H. Lüth
  • M. J. Schöning

A new type of thin film chemical microsensors based on chalcogenide glass-sensitive materials was developed by means of silicon planar technology and pulsed laser deposition technique. These miniaturised ion-selective electrodes (ISEs) exhibit Nernstian responses over five concentration decades with detection limits of 1 × 10-7 mol/l towards the primary ions Cu and Pb, and 4 × 10-7 and 3 × 10-5 mol/l towards Cd and Tl, respectively. The thin film microsensors have been shown to be perspective instruments for the simultaneous multicomponent analysis of complex liquid media based on the principles of an 'electronic tongue' device. Incorporating the thin film sensors into a sensor array allowed the multicomponent analysis of heavy metal-ion species (Pb2+, Cd2+, Zn2+ and Fe3+). The concentrations of Pb2+-, Cd2+- and Zn2+-ions can be determined simultaneously by direct potentiometric measurements using a sensor array of seven all-solid-state thin film chemical microsensors with an accuracy of 15-30%. The sensor array allows overcoming the problem of an insufficient selectivity of single sensors. The suggested microsystem-compatible fabrication technique favours a further miniaturisation, aimed to a fully integrated electrochemical microsystem.

Язык оригиналаанглийский
Страницы (с-по)251-258
Число страниц8
ЖурналElectrochimica Acta
Том47
Номер выпуска1
DOI
СостояниеОпубликовано - 1 сен 2001

    Предметные области Scopus

  • Химическая технология (все)
  • Аналитическая химия
  • Электрохимия

ID: 30515738