Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires

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Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires. / Pipa, A. V.; Sushentsev, D.; Hamann, S.; Dufloux, C.; Ionikh, Yu Z.; Hannemann, M.; Wiese, M.; Röpcke, J.; Wollweber, J.

в: Contributions to Plasma Physics, Том 58, № 5, 06.2018, стр. 353-366.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Author

Pipa, A. V. ; Sushentsev, D. ; Hamann, S. ; Dufloux, C. ; Ionikh, Yu Z. ; Hannemann, M. ; Wiese, M. ; Röpcke, J. ; Wollweber, J. / Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires. в: Contributions to Plasma Physics. 2018 ; Том 58, № 5. стр. 353-366.

BibTeX

@article{e4fdd8e98bde4fb6bf610c93bc9a3f34,

title = "Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires",

abstract = "A microwave torch in nitrogen has been designed for the evaporation of aluminium (Al) wires potentially to be used for the synthesis of aluminium nitride (AlN). The torch, created on the tip of a metallic nozzle, is compatible with vacuum conditions and can be operated in continuous mode up to atmospheric pressure. Al wires to be evaporated are fed through the axis of the nozzle. Time-resolved photography is applied to analyse the time evolution and stability of the interaction of the Al wire with the discharge. Optical emission spectroscopy is used (a) for the determination of the gas temperature of the active discharge, which is found to be in the range 1500–3500 K depending on the experimental conditions, and (b) for the estimation of the densities of Al and N atoms in the afterglow region, which are in the range 1011–1012 and of 1013–1014 cm−3, respectively. It is found that the part of the Al wire that is directly exposed to the nitrogen torch absorbs a considerable amount of the microwave energy, supporting its evaporation. In addition, the dissociation of molecular nitrogen has to be considered as an important process of power dissipation. Further technical development of the torch is necessary for the envisaged synthesis of AlN.",

keywords = "aluminium nitride, microwave torch, optical emission spectroscopy",

author = "Pipa, {A. V.} and D. Sushentsev and S. Hamann and C. Dufloux and Ionikh, {Yu Z.} and M. Hannemann and M. Wiese and J. R{\"o}pcke and J. Wollweber",

note = "Funding Information: The authors wish to thank Uwe Macherius, Frank Weichbrodt, Adrian Wagner, and Heike Oppermann for continuous technical support. They are grateful to Reinhard Fischer (IBF Electronic GmbH) for suggesting and assisting in the assembly of the microwave torch. In addition, they wish to express their gratitude to Mathias Andrasch for his help in the calibration of the diodes used to measure the microwave power and useful discussions. This work was supported by the German Federation of Industrial Research Associations (AiF) within the framework of the projects FKZ: VP2046517CK4 and VP2194412CK4. D.S. wishes to thank the German?Russian Interdisciplinary Science Center (G-RISC) funded by the German Federal Foreign Office via the German Academic Exchange Service (DAAD) for support this studies at the INP Greifswald, Grant Nos. P-2016a-7 and P-2016b-21. A.V.P. wishes to thank Andy Nave for useful discussion. Publisher Copyright: {\textcopyright} 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",

year = "2018",

month = jun,

doi = "10.1002/ctpp.201700112",

language = "English",

volume = "58",

pages = "353--366",

journal = "Contributions to Plasma Physics",

issn = "0863-1042",

publisher = "Wiley-Blackwell",

number = "5",

}

RIS

TY - JOUR

T1 - Design and optical study of a microwave plasma torch in nitrogen used for the evaporation of aluminium wires

AU - Pipa, A. V.

AU - Sushentsev, D.

AU - Hamann, S.

AU - Dufloux, C.

AU - Ionikh, Yu Z.

AU - Hannemann, M.

AU - Wiese, M.

AU - Röpcke, J.

AU - Wollweber, J.

N1 - Funding Information: The authors wish to thank Uwe Macherius, Frank Weichbrodt, Adrian Wagner, and Heike Oppermann for continuous technical support. They are grateful to Reinhard Fischer (IBF Electronic GmbH) for suggesting and assisting in the assembly of the microwave torch. In addition, they wish to express their gratitude to Mathias Andrasch for his help in the calibration of the diodes used to measure the microwave power and useful discussions. This work was supported by the German Federation of Industrial Research Associations (AiF) within the framework of the projects FKZ: VP2046517CK4 and VP2194412CK4. D.S. wishes to thank the German?Russian Interdisciplinary Science Center (G-RISC) funded by the German Federal Foreign Office via the German Academic Exchange Service (DAAD) for support this studies at the INP Greifswald, Grant Nos. P-2016a-7 and P-2016b-21. A.V.P. wishes to thank Andy Nave for useful discussion. Publisher Copyright: © 2017 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

PY - 2018/6

Y1 - 2018/6

N2 - A microwave torch in nitrogen has been designed for the evaporation of aluminium (Al) wires potentially to be used for the synthesis of aluminium nitride (AlN). The torch, created on the tip of a metallic nozzle, is compatible with vacuum conditions and can be operated in continuous mode up to atmospheric pressure. Al wires to be evaporated are fed through the axis of the nozzle. Time-resolved photography is applied to analyse the time evolution and stability of the interaction of the Al wire with the discharge. Optical emission spectroscopy is used (a) for the determination of the gas temperature of the active discharge, which is found to be in the range 1500–3500 K depending on the experimental conditions, and (b) for the estimation of the densities of Al and N atoms in the afterglow region, which are in the range 1011–1012 and of 1013–1014 cm−3, respectively. It is found that the part of the Al wire that is directly exposed to the nitrogen torch absorbs a considerable amount of the microwave energy, supporting its evaporation. In addition, the dissociation of molecular nitrogen has to be considered as an important process of power dissipation. Further technical development of the torch is necessary for the envisaged synthesis of AlN.

AB - A microwave torch in nitrogen has been designed for the evaporation of aluminium (Al) wires potentially to be used for the synthesis of aluminium nitride (AlN). The torch, created on the tip of a metallic nozzle, is compatible with vacuum conditions and can be operated in continuous mode up to atmospheric pressure. Al wires to be evaporated are fed through the axis of the nozzle. Time-resolved photography is applied to analyse the time evolution and stability of the interaction of the Al wire with the discharge. Optical emission spectroscopy is used (a) for the determination of the gas temperature of the active discharge, which is found to be in the range 1500–3500 K depending on the experimental conditions, and (b) for the estimation of the densities of Al and N atoms in the afterglow region, which are in the range 1011–1012 and of 1013–1014 cm−3, respectively. It is found that the part of the Al wire that is directly exposed to the nitrogen torch absorbs a considerable amount of the microwave energy, supporting its evaporation. In addition, the dissociation of molecular nitrogen has to be considered as an important process of power dissipation. Further technical development of the torch is necessary for the envisaged synthesis of AlN.

KW - aluminium nitride

KW - microwave torch

KW - optical emission spectroscopy

UR - http://www.scopus.com/inward/record.url?scp=85035207372&partnerID=8YFLogxK

U2 - 10.1002/ctpp.201700112

DO - 10.1002/ctpp.201700112

M3 - Article

AN - SCOPUS:85035207372

VL - 58

SP - 353

EP - 366

JO - Contributions to Plasma Physics

JF - Contributions to Plasma Physics

SN - 0863-1042

IS - 5

ER -

ID: 32868586