Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Charge state of luminescence centers in the Si-SiO2 structures subjected to sequential implantation with silicon and carbon ions. / Baraban, A. P.; Petrov, Yu V.
в: Semiconductors, Том 42, № 13, 01.12.2008, стр. 1515-1518.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Charge state of luminescence centers in the Si-SiO2 structures subjected to sequential implantation with silicon and carbon ions
AU - Baraban, A. P.
AU - Petrov, Yu V.
PY - 2008/12/1
Y1 - 2008/12/1
N2 - Electroluminescence of Si-SiO2 structures subjected to sequential implantation of silicon and carbon ions and to postimplantation annealing is studied. It is shown that two bands appear in the electroluminescence spectrum with energies of 2.7 and 4.3 eV as a result of ion implantation. After annealing, the band peaked at the energy of 3.2 eV appears in the spectrum; this band can be related to the formation silicon-carbide clusters. Charge characteristics of the structures under study are obtained. It is shown that the luminescence centers responsible for all bands are not charged.
AB - Electroluminescence of Si-SiO2 structures subjected to sequential implantation of silicon and carbon ions and to postimplantation annealing is studied. It is shown that two bands appear in the electroluminescence spectrum with energies of 2.7 and 4.3 eV as a result of ion implantation. After annealing, the band peaked at the energy of 3.2 eV appears in the spectrum; this band can be related to the formation silicon-carbide clusters. Charge characteristics of the structures under study are obtained. It is shown that the luminescence centers responsible for all bands are not charged.
UR - http://www.scopus.com/inward/record.url?scp=57849108173&partnerID=8YFLogxK
U2 - 10.1134/S1063782608130137
DO - 10.1134/S1063782608130137
M3 - Article
VL - 42
SP - 1515
EP - 1518
JO - Semiconductors
JF - Semiconductors
SN - 1063-7826
IS - 13
ER -
ID: 5250525