Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique. / Schubert, J.; Schöning, M. J.; Schmidt, C.; Siegert, M.; Mesters, St; Zander, W.; Kordos, P.; Lüth, H.; Legin, A.; Mourzina, Yu G.; Seleznev, B.; Vlasov, Yu G.
в: Applied Physics A: Materials Science and Processing, Том 69, № 7, 01.01.1999.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique
AU - Schubert, J.
AU - Schöning, M. J.
AU - Schmidt, C.
AU - Siegert, M.
AU - Mesters, St
AU - Zander, W.
AU - Kordos, P.
AU - Lüth, H.
AU - Legin, A.
AU - Mourzina, Yu G.
AU - Seleznev, B.
AU - Vlasov, Yu G.
PY - 1999/1/1
Y1 - 1999/1/1
N2 - One advantage of the pulsed laser deposition (PLD) method is the stoichiometric transfer of multicomponent target material to a given substrate. This advantage of the PLD determined the choice to prepare chalcogenide-based thin films with an off-axis geometry PLD. Ag-As-S and Cu-Ag-As-Se-Te targets were used to deposit thin films on Si substrates for an application as a heavy metal sensing device. The films were characterized by means of Rutherford backscattering spectrometry (RBS), transmission electron microscopy (TEM), and electrochemical measurements. The same stoichiometry of the films and the targets was confirmed by RBS measurements. We observed a good long-term stability of more than 60 days and a nearly Nernstian sensitivity towards Pb and Cu, which is comparable to bulk sensors.
AB - One advantage of the pulsed laser deposition (PLD) method is the stoichiometric transfer of multicomponent target material to a given substrate. This advantage of the PLD determined the choice to prepare chalcogenide-based thin films with an off-axis geometry PLD. Ag-As-S and Cu-Ag-As-Se-Te targets were used to deposit thin films on Si substrates for an application as a heavy metal sensing device. The films were characterized by means of Rutherford backscattering spectrometry (RBS), transmission electron microscopy (TEM), and electrochemical measurements. The same stoichiometry of the films and the targets was confirmed by RBS measurements. We observed a good long-term stability of more than 60 days and a nearly Nernstian sensitivity towards Pb and Cu, which is comparable to bulk sensors.
UR - http://www.scopus.com/inward/record.url?scp=21344435733&partnerID=8YFLogxK
U2 - 10.1007/s003390051534
DO - 10.1007/s003390051534
M3 - Article
AN - SCOPUS:21344435733
VL - 69
JO - Applied Physics A: Materials Science and Processing
JF - Applied Physics A: Materials Science and Processing
SN - 0947-8396
IS - 7
ER -
ID: 30517634