Abstract—: A vacuum holographic microscope is designed to probe the atomic structure of thin metal films. The experimental setup is based on the use of a source of a monochromatic low-energy electron beam induced by a tip cathode spaced from the sample at a distance of several tens of nanometers. The visual resolution of atoms of the object requires a microscope magnification of at least 10⁵, which necessitates high-accuracy movement of the electron source. The parameters of principal nodes of the microscope, which are responsible for the generation and recording of useful signals, are studied and optimized, as well.