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Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy. / Filatova, E.; Taracheva, E.; Shevchenko, G.; Sokolov, A.; Kozhevnikov, I.; Yulin, S.; Schaefers, F.; Braun, W.

в: Physica Status Solidi (B): Basic Research, Том 246, № 7, 2009, стр. 1454-1458.

Результаты исследований: Научные публикации в периодических изданиях › статья

Harvard

Filatova, E, Taracheva, E, Shevchenko, G, Sokolov, A, Kozhevnikov, I, Yulin, S, Schaefers, F & Braun, W 2009, 'Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy', Physica Status Solidi (B): Basic Research, Том. 246, № 7, стр. 1454-1458. https://doi.org/10.1002/pssb.200945069

APA

Filatova, E., Taracheva, E., Shevchenko, G., Sokolov, A., Kozhevnikov, I., Yulin, S., Schaefers, F., & Braun, W. (2009). Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy. Physica Status Solidi (B): Basic Research, 246(7), 1454-1458. https://doi.org/10.1002/pssb.200945069

Vancouver

Filatova E, Taracheva E, Shevchenko G, Sokolov A, Kozhevnikov I, Yulin S и пр. Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy. Physica Status Solidi (B): Basic Research. 2009;246(7):1454-1458. https://doi.org/10.1002/pssb.200945069

Author

Filatova, E. ; Taracheva, E. ; Shevchenko, G. ; Sokolov, A. ; Kozhevnikov, I. ; Yulin, S. ; Schaefers, F. ; Braun, W. / Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy. в: Physica Status Solidi (B): Basic Research. 2009 ; Том 246, № 7. стр. 1454-1458.

BibTeX

@article{ecf7da98c9b84634baa36a2e3e5abd9c,
title = "Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy",
abstract = "The paper shows the importance of soft X-ray reflection spectroscopy as a non-destructive in-depth characterization tool for the middle atomic ordering in TiO2 thin films. The microstructure of TiO2 films synthesized by magnetron sputtering on Si(100) wafers was characterized by X-ray reflection spectroscopy (XRS), X-ray Diffraction (XRD) method and X-ray reflectometry (XRR). Reflection spectra and calculated absorption spectra were analyzed in the vicinity of Ti L2,3 and O K absorption edges. It was established that the 70 nm TiO2 film is polycrystalline with an anatase structure and homogeneous in depth. The 10 nm TiO2 film is amorphous. {\textcopyright} 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.",
author = "E. Filatova and E. Taracheva and G. Shevchenko and A. Sokolov and I. Kozhevnikov and S. Yulin and F. Schaefers and W. Braun",
year = "2009",
doi = "10.1002/pssb.200945069",
language = "English",
volume = "246",
pages = "1454--1458",
journal = "Physica Status Solidi (B): Basic Research",
issn = "0370-1972",
publisher = "Wiley-Blackwell",
number = "7",

}

RIS

TY - JOUR

T1 - Atomic ordering in TiO2 thin films studied by x-ray reflection spectroscopy

AU - Filatova, E.

AU - Taracheva, E.

AU - Shevchenko, G.

AU - Sokolov, A.

AU - Kozhevnikov, I.

AU - Yulin, S.

AU - Schaefers, F.

AU - Braun, W.

PY - 2009

Y1 - 2009

N2 - The paper shows the importance of soft X-ray reflection spectroscopy as a non-destructive in-depth characterization tool for the middle atomic ordering in TiO2 thin films. The microstructure of TiO2 films synthesized by magnetron sputtering on Si(100) wafers was characterized by X-ray reflection spectroscopy (XRS), X-ray Diffraction (XRD) method and X-ray reflectometry (XRR). Reflection spectra and calculated absorption spectra were analyzed in the vicinity of Ti L2,3 and O K absorption edges. It was established that the 70 nm TiO2 film is polycrystalline with an anatase structure and homogeneous in depth. The 10 nm TiO2 film is amorphous. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

AB - The paper shows the importance of soft X-ray reflection spectroscopy as a non-destructive in-depth characterization tool for the middle atomic ordering in TiO2 thin films. The microstructure of TiO2 films synthesized by magnetron sputtering on Si(100) wafers was characterized by X-ray reflection spectroscopy (XRS), X-ray Diffraction (XRD) method and X-ray reflectometry (XRR). Reflection spectra and calculated absorption spectra were analyzed in the vicinity of Ti L2,3 and O K absorption edges. It was established that the 70 nm TiO2 film is polycrystalline with an anatase structure and homogeneous in depth. The 10 nm TiO2 film is amorphous. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

U2 - 10.1002/pssb.200945069

DO - 10.1002/pssb.200945069

M3 - Article

VL - 246

SP - 1454

EP - 1458

JO - Physica Status Solidi (B): Basic Research

JF - Physica Status Solidi (B): Basic Research

SN - 0370-1972

IS - 7

ER -

ID: 5192122