Abstract: In this work, the profiles of craters obtained by the irradiation of a picosecond laser with a wavelength of 1064 nm and energy density in the range of 0.4–7.0 J/cm2 of tungsten films were measured using energy-dispersive X-ray spectroscopy, as well as a contact profilometry. The presence of several mechanisms of surface erosion at given irradiation parameters is shown. The influence of the craters shape on the signal of laser-assisted quadrupole mass spectrometry during irradiation of deuterium-containing tungsten films is analyzed. © 2025 Elsevier B.V., All rights reserved.