Standard

Additive technologies for ceramic MEMS sensors. / Vasiliev, A. A.; Sokolov, A. V.; Legin, A. V.; Samotaev, N. N.; Oblov, K. Yu; Kim, V. P.; Tkachev, S. V.; Gubin, S. P.; Potapov, G. N.; Kokhtina, Yu V.; Nisan, A. V.

в: Procedia Engineering, Том 120, 01.01.2015, стр. 1087-1090.

Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование

Harvard

Vasiliev, AA, Sokolov, AV, Legin, AV, Samotaev, NN, Oblov, KY, Kim, VP, Tkachev, SV, Gubin, SP, Potapov, GN, Kokhtina, YV & Nisan, AV 2015, 'Additive technologies for ceramic MEMS sensors', Procedia Engineering, Том. 120, стр. 1087-1090. https://doi.org/10.1016/j.proeng.2015.08.775

APA

Vasiliev, A. A., Sokolov, A. V., Legin, A. V., Samotaev, N. N., Oblov, K. Y., Kim, V. P., Tkachev, S. V., Gubin, S. P., Potapov, G. N., Kokhtina, Y. V., & Nisan, A. V. (2015). Additive technologies for ceramic MEMS sensors. Procedia Engineering, 120, 1087-1090. https://doi.org/10.1016/j.proeng.2015.08.775

Vancouver

Vasiliev AA, Sokolov AV, Legin AV, Samotaev NN, Oblov KY, Kim VP и пр. Additive technologies for ceramic MEMS sensors. Procedia Engineering. 2015 Янв. 1;120:1087-1090. https://doi.org/10.1016/j.proeng.2015.08.775

Author

Vasiliev, A. A. ; Sokolov, A. V. ; Legin, A. V. ; Samotaev, N. N. ; Oblov, K. Yu ; Kim, V. P. ; Tkachev, S. V. ; Gubin, S. P. ; Potapov, G. N. ; Kokhtina, Yu V. ; Nisan, A. V. / Additive technologies for ceramic MEMS sensors. в: Procedia Engineering. 2015 ; Том 120. стр. 1087-1090.

BibTeX

@article{8b5cc32106dc422299fb23d447ca4bc3,
title = "Additive technologies for ceramic MEMS sensors",
abstract = "The application of MEMS technology for the fabrication of MOX sensors with low power consumption becomes now a very important trend in gas sensor design. However, traditional silicon technology has some evident disadvantages, when applied in high-temperature devices produced in limited batch. We present our attempt to combine the advantages of ceramic MEMS technology (high working (600°C) and technological treatment (1000°C) temperature, chemical stability at high temperature) with the advantages of additive technologies for the fabrication of functional elements of gas sensor (heaters, sensing, and catalytic layers). We developed conductive silver, gold and platinum nanoparticle (10-30 nm) inks usable in ink and aerosol jet printers and demonstrated the possibility to fabricate narrow conductive lines of microheaters and electrodes of sensor (line width ∼ 35 μm). The combination of jet printing onto thin ceramic substrate with laser cutting enables the fabrication of advanced cantilever type sensors operating in pulsing heating mode.",
keywords = "Additive technology, Aerosol jet printing, Gas sensors, Ink jet printing, MEMS",
author = "Vasiliev, {A. A.} and Sokolov, {A. V.} and Legin, {A. V.} and Samotaev, {N. N.} and Oblov, {K. Yu} and Kim, {V. P.} and Tkachev, {S. V.} and Gubin, {S. P.} and Potapov, {G. N.} and Kokhtina, {Yu V.} and Nisan, {A. V.}",
year = "2015",
month = jan,
day = "1",
doi = "10.1016/j.proeng.2015.08.775",
language = "English",
volume = "120",
pages = "1087--1090",
journal = "Procedia Engineering",
issn = "1877-7058",
publisher = "Elsevier",
note = "29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015. ; Conference date: 06-09-2015 Through 09-09-2015",

}

RIS

TY - JOUR

T1 - Additive technologies for ceramic MEMS sensors

AU - Vasiliev, A. A.

AU - Sokolov, A. V.

AU - Legin, A. V.

AU - Samotaev, N. N.

AU - Oblov, K. Yu

AU - Kim, V. P.

AU - Tkachev, S. V.

AU - Gubin, S. P.

AU - Potapov, G. N.

AU - Kokhtina, Yu V.

AU - Nisan, A. V.

PY - 2015/1/1

Y1 - 2015/1/1

N2 - The application of MEMS technology for the fabrication of MOX sensors with low power consumption becomes now a very important trend in gas sensor design. However, traditional silicon technology has some evident disadvantages, when applied in high-temperature devices produced in limited batch. We present our attempt to combine the advantages of ceramic MEMS technology (high working (600°C) and technological treatment (1000°C) temperature, chemical stability at high temperature) with the advantages of additive technologies for the fabrication of functional elements of gas sensor (heaters, sensing, and catalytic layers). We developed conductive silver, gold and platinum nanoparticle (10-30 nm) inks usable in ink and aerosol jet printers and demonstrated the possibility to fabricate narrow conductive lines of microheaters and electrodes of sensor (line width ∼ 35 μm). The combination of jet printing onto thin ceramic substrate with laser cutting enables the fabrication of advanced cantilever type sensors operating in pulsing heating mode.

AB - The application of MEMS technology for the fabrication of MOX sensors with low power consumption becomes now a very important trend in gas sensor design. However, traditional silicon technology has some evident disadvantages, when applied in high-temperature devices produced in limited batch. We present our attempt to combine the advantages of ceramic MEMS technology (high working (600°C) and technological treatment (1000°C) temperature, chemical stability at high temperature) with the advantages of additive technologies for the fabrication of functional elements of gas sensor (heaters, sensing, and catalytic layers). We developed conductive silver, gold and platinum nanoparticle (10-30 nm) inks usable in ink and aerosol jet printers and demonstrated the possibility to fabricate narrow conductive lines of microheaters and electrodes of sensor (line width ∼ 35 μm). The combination of jet printing onto thin ceramic substrate with laser cutting enables the fabrication of advanced cantilever type sensors operating in pulsing heating mode.

KW - Additive technology

KW - Aerosol jet printing

KW - Gas sensors

KW - Ink jet printing

KW - MEMS

UR - http://www.scopus.com/inward/record.url?scp=84985006605&partnerID=8YFLogxK

U2 - 10.1016/j.proeng.2015.08.775

DO - 10.1016/j.proeng.2015.08.775

M3 - Conference article

AN - SCOPUS:84985006605

VL - 120

SP - 1087

EP - 1090

JO - Procedia Engineering

JF - Procedia Engineering

SN - 1877-7058

T2 - 29th European Conference on Solid-State Transducers, EUROSENSORS 2015; Freiburg; Germany; 6 September 2015 through 9 September 2015.

Y2 - 6 September 2015 through 9 September 2015

ER -

ID: 36042394