DOI

The hierarchy of X-ray spectroscopic methods is presented. Principles, basic and modified methods and the main information which one can extract employing one or another method, are discussed. Example of the application of X-ray reflection and emission spectroscopic analysis of Al2O 3/Si structure synthesized by atomic layer deposition (ALD) method is presented, too. © 2007 Springer.
Original languageEnglish
Pages (from-to)371-381
Number of pages11
JournalNATO Security through Science Series B: Physics and Biophysics
DOIs
StatePublished - 1 Dec 2007

    Research areas

  • core levels, radiative and non-radiative decay, spectroscopic methods, valence and conduction bands, X-ray

ID: 122242179