© 2015, Pleiades Publishing, Ltd. It is found for inductively coupled plasma (ICP) discharges in two-chamber structures in which a strong electron temperature gradient can be produced, the classical Boltzmann distribution for the electron number density does not exist even at qualitative level; a more general (extended Boltzmann) distribution for the electron energy density holds with a satisfactory accuracy.
Original languageEnglish
Pages (from-to)1570-1573
JournalTechnical Physics
Volume60
Issue number10
DOIs
StatePublished - 2015

ID: 3983886