Abstract: The presented system for the theoretical and experimental evaluation of images obtained in a holographic microscope can be directly used for the diagnostics of industrial products during the manufacturing process. It is found that controlling the positioning of the cathode–research object in a holographic microscope can be effectively carried out by monitoring the substrate current. The resolution of the coordinate-sensitive detector of the microscope is calculated to be 400−0.4 nm. It is shown that continuous monitoring of the conditions of experimental research is necessary to obtain an informative image because each object under study is essentially unique. Test studies of thin aluminum films are performed.