The necessity for obtaining detailed information related to the function of electron distribution by energies (FEDE) arises because the electron component essentially determines the plasma properties in general. The probing method is the only one for measuring FEDE. The works are considered, which made it possible to expand the probing methods of the FEDE determination to the areas of intermediate and high (up to hundred torrs) pressures. Methods for automatic (schematic) compensation or exclusion of the main systematic errors by the FEDE distribution measurements, related to ion current, plasma finite conductivity between the voluminous charge layer boundary and support electrode, and facility apparatus function are considered.