The conditions of the layer-by-layer synthesis of the Mn-O nanolayers on the basis of the Mn ²⁺ and MnO ^- ₄ salts by the successive ionic layer deposition method were determined. The influence of the reactant concentration, the time of the treatment of substrates by the reactant and the number of the synthesis cycles on the growth kinetics was studied. The synthesized layers were examined by the FTIR and X-ray photoelectron spectroscopy, the ellipsometry and X-ray diffraction analysis. The data obtained showed that the composition of these layers is MnO ₂ ·nH ₂ O.