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The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure. / Kudryavtsev, Anatoly; Serditov, Konstantin.

In: Bulletin of the American Physical Society, Vol. 57, No. 8, 2012.

Research output: Contribution to journal › Article › peer-review

Harvard

Kudryavtsev, A & Serditov, K 2012, 'The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure', Bulletin of the American Physical Society, vol. 57, no. 8. <http://meeting.aps.org/Meeting/GEC12/Event/174129>

APA

Kudryavtsev, A., & Serditov, K. (2012). The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure. Bulletin of the American Physical Society, 57(8). http://meeting.aps.org/Meeting/GEC12/Event/174129

Vancouver

Kudryavtsev A, Serditov K. The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure. Bulletin of the American Physical Society. 2012;57(8).

Author

Kudryavtsev, Anatoly ; Serditov, Konstantin. / The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure. In: Bulletin of the American Physical Society. 2012 ; Vol. 57, No. 8.

BibTeX

@article{094b26cda60d41d1b796f36946a959a6,
title = "The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure",
abstract = "2D simulations of the two-chamber ICP source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber is performed. Depending on pressure two main scenarios of plasma density and its spatial distribution behavior were identified. The first case of higher pressure is characterized by localization of plasma in small driver chamber where power is deposed and corresponds to small thermal conductivity length compared with diffusion length. The second case of lower pressure represents diffusion chamber as a main source of plasma with maximum of electron density with greater thermal conductivity length compared with diffusion length. The differences in spatial distribution are caused by local or non-local behavior of energy transport in discharge volume due to the different characteristic scale of heat transfer with electronic conductivity. As a result changing of geometrics and gas pressure gives the possibility to set ratio between d",
author = "Anatoly Kudryavtsev and Konstantin Serditov",
year = "2012",
language = "English",
volume = "57",
journal = "Bulletin of the American Physical Society",
issn = "0003-0503",
publisher = "American Physical Society",
number = "8",

}

RIS

TY - JOUR

T1 - The role of nonlocal electron energy transport in the formation of spatial distributions of the two-chamber plasma density of ICP discharge at change of gas pressure

AU - Kudryavtsev, Anatoly

AU - Serditov, Konstantin

PY - 2012

Y1 - 2012

N2 - 2D simulations of the two-chamber ICP source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber is performed. Depending on pressure two main scenarios of plasma density and its spatial distribution behavior were identified. The first case of higher pressure is characterized by localization of plasma in small driver chamber where power is deposed and corresponds to small thermal conductivity length compared with diffusion length. The second case of lower pressure represents diffusion chamber as a main source of plasma with maximum of electron density with greater thermal conductivity length compared with diffusion length. The differences in spatial distribution are caused by local or non-local behavior of energy transport in discharge volume due to the different characteristic scale of heat transfer with electronic conductivity. As a result changing of geometrics and gas pressure gives the possibility to set ratio between d

AB - 2D simulations of the two-chamber ICP source where power is supplied in the small discharge chamber and extends by electron thermal conductivity mechanism to the big diffusion chamber is performed. Depending on pressure two main scenarios of plasma density and its spatial distribution behavior were identified. The first case of higher pressure is characterized by localization of plasma in small driver chamber where power is deposed and corresponds to small thermal conductivity length compared with diffusion length. The second case of lower pressure represents diffusion chamber as a main source of plasma with maximum of electron density with greater thermal conductivity length compared with diffusion length. The differences in spatial distribution are caused by local or non-local behavior of energy transport in discharge volume due to the different characteristic scale of heat transfer with electronic conductivity. As a result changing of geometrics and gas pressure gives the possibility to set ratio between d

M3 - Article

VL - 57

JO - Bulletin of the American Physical Society

JF - Bulletin of the American Physical Society

SN - 0003-0503

IS - 8

ER -

ID: 5403019